P-1000™ Batch System
PLC controller with touch screen interface provides industrial reliability and ease of use. Complete system enclosure minimizes footprint.
PX-250™ Plasma Cleaning System
For ease in cleaning and resistance to chemical attack, the chamber is constructed of stainless steel. Multiple removable shevles can be configured by the user.
PX-500™ Plasma Cleaning System
The process control modual automatically controls and monitors the vacuum and gas flow, chamber pressure power level, and controls the cycle by elapsed time.
- Plasma cleaning solution for BGA, bonding, mcm, flip chip, chip scale.
XTRAK™ In-Line System
With process capability of up to 180 substrates or carriers per hour, the system's Smart Tune™ management system provides closed-loop control that reduces tuning to less than one second.
FlexTRAK™ In-Line SystemThe FlexTRAK system offers high-throughput capability of up to 480 substrates or process carriers per hour. Its small chamber volume and proprietary process control enable unmatched short cycle times, while its unique slim structure minimizes floor space requirements.
ITRAK™ In-Line System
The March ITRAK system introduces the first in-line single strip/ carrier plasma processing system. A three-axis symmetrical chamber ensures that all positions of the strip are treated uniformly.